Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10700166 | Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus | Yoshihiro Kai, Shinya Ishikawa, Yuji Kamikawa, Shuichi Nagamine | 2020-06-30 |
| 10535528 | Method of forming titanium oxide film and method of forming hard mask | Toshio Hasegawa, Naotaka Noro, Miyako Kaneko | 2020-01-14 |