Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10835908 | Substrate processing method | Takehiko Orii, Itaru Kanno | 2020-11-17 |
| 10811264 | Film-forming method and film-forming apparatus | Yuichiro WAGATSUMA, Naotaka Noro | 2020-10-20 |
| 10811283 | Substrate cleaning method, substrate cleaning system, and memory medium | Keiji Tanouchi, Takehiko Orii, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2020-10-20 |
| 10535528 | Method of forming titanium oxide film and method of forming hard mask | Naoki Shindo, Toshio Hasegawa, Naotaka Noro | 2020-01-14 |