Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811283 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii, Itaru Kanno, Satoru Tanaka | 2020-10-20 |
| 10792711 | Substrate processing system, substrate cleaning method, and recording medium | Yuki Yoshida, Hisashi Kawano, Masami Yamashita, Itaru Kanno, Kenji Mochida +1 more | 2020-10-06 |
| 10734255 | Substrate cleaning method, substrate cleaning system and memory medium | Kenji Sekiguchi, Itaru Kanno, Kouzou Tachibana | 2020-08-04 |