Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10835908 | Substrate processing method | Miyako Kaneko, Takehiko Orii | 2020-11-17 |
| 10811283 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii, Meitoku Aibara, Satoru Tanaka | 2020-10-20 |
| 10792711 | Substrate processing system, substrate cleaning method, and recording medium | Meitoku Aibara, Yuki Yoshida, Hisashi Kawano, Masami Yamashita, Kenji Mochida +1 more | 2020-10-06 |
| 10734255 | Substrate cleaning method, substrate cleaning system and memory medium | Kenji Sekiguchi, Meitoku Aibara, Kouzou Tachibana | 2020-08-04 |