Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867814 | Liquid processing method, substrate processing apparatus, and storage medium | Yosuke Kawabuchi, Mitsunori Nakamori, Kotaro Ooishi, Keisuke Egashira, Koji Tanaka +6 more | 2020-12-15 |
| 10770284 | Substrate processing method and substrate processing apparatus | Hiroki Yonekawa, Shuhei Takahashi, Hideki Nishimura | 2020-09-08 |
| 10734255 | Substrate cleaning method, substrate cleaning system and memory medium | Kenji Sekiguchi, Itaru Kanno, Meitoku Aibara | 2020-08-04 |