Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867814 | Liquid processing method, substrate processing apparatus, and storage medium | Yosuke Kawabuchi, Kouzou Tachibana, Kotaro Ooishi, Keisuke Egashira, Koji Tanaka +6 more | 2020-12-15 |
| 10727042 | Liquid processing method, substrate processing apparatus and recording medium | Yosuke Kawabuchi, Takuro Masuzumi, Koji Yamashita, Shozou Maeda | 2020-07-28 |