Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867814 | Liquid processing method, substrate processing apparatus, and storage medium | Yosuke Kawabuchi, Kouzou Tachibana, Mitsunori Nakamori, Kotaro Ooishi, Koji Tanaka +6 more | 2020-12-15 |
| 10692739 | Substrate processing apparatus | Yosuke Kawabuchi, Gentaro Goshi, Hiroki Ohno, Hiroshi Marumoto, Takuro Masuzumi +2 more | 2020-06-23 |
| 10576493 | Substrate processing apparatus and substrate processing method | Gentaro Goshi, Hiroshi Marumoto, Kento Tsukano | 2020-03-03 |
| 10566182 | Substrate processing apparatus, substrate processing method, and storage medium | Gentaro Goshi | 2020-02-18 |