Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692739 | Substrate processing apparatus | Yosuke Kawabuchi, Gentaro Goshi, Keisuke Egashira, Hiroki Ohno, Hiroshi Marumoto +2 more | 2020-06-23 |
| 10576493 | Substrate processing apparatus and substrate processing method | Keisuke Egashira, Gentaro Goshi, Hiroshi Marumoto | 2020-03-03 |