Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844332 | Aqueous cleaning solution and method of protecting features on a substrate during etch residue removal | Takayuki Toshima, Yoshinori Nishiwaki, Trace Hurd | 2020-11-24 |
| 10847387 | Substrate processing apparatus, substrate processing method and recording medium | — | 2020-11-24 |
| 10707098 | Substrate processing apparatus, substrate processing method and memory medium | — | 2020-07-07 |
| 10692739 | Substrate processing apparatus | Yosuke Kawabuchi, Gentaro Goshi, Keisuke Egashira, Hiroki Ohno, Takuro Masuzumi +2 more | 2020-06-23 |
| 10576493 | Substrate processing apparatus and substrate processing method | Keisuke Egashira, Gentaro Goshi, Kento Tsukano | 2020-03-03 |