Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867814 | Liquid processing method, substrate processing apparatus, and storage medium | Yosuke Kawabuchi, Kouzou Tachibana, Mitsunori Nakamori, Kotaro Ooishi, Keisuke Egashira +6 more | 2020-12-15 |
| 10727042 | Liquid processing method, substrate processing apparatus and recording medium | Mitsunori Nakamori, Yosuke Kawabuchi, Koji Yamashita, Shozou Maeda | 2020-07-28 |
| 10692739 | Substrate processing apparatus | Yosuke Kawabuchi, Gentaro Goshi, Keisuke Egashira, Hiroki Ohno, Hiroshi Marumoto +2 more | 2020-06-23 |