Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10835908 | Substrate processing method | Miyako Kaneko, Itaru Kanno | 2020-11-17 |
| 10811283 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2020-10-20 |
| 10734243 | Etching method and substrate processing system | Tsuhung Huang, Jun LIN | 2020-08-04 |
| 10665470 | Etching method and etching apparatus | Yasuo ASADA, Shinji Irie, Nobuhiro Takahashi, Ayano HAGIWARA, Tatsuya Yamaguchi | 2020-05-26 |