Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665470 | Etching method and etching apparatus | Takehiko Orii, Shinji Irie, Nobuhiro Takahashi, Ayano HAGIWARA, Tatsuya Yamaguchi | 2020-05-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665470 | Etching method and etching apparatus | Takehiko Orii, Shinji Irie, Nobuhiro Takahashi, Ayano HAGIWARA, Tatsuya Yamaguchi | 2020-05-26 |