Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879060 | Substrate processing apparatus, method of manufacturing semiconductor device, and storage medium | — | 2020-12-29 |
| 10840084 | Method of manufacturing semiconductor device and substrate processing apparatus | — | 2020-11-17 |
| 10790135 | Method of manufacturing semiconductor device | Reiji Niino, Syuji NOZAWA, Makoto Fujikawa | 2020-09-29 |
| 10755971 | Method of manufacturing semiconductor device | Reiji Niino, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2020-08-25 |
| 10748782 | Method of manufacturing semiconductor device | Reiji Niino, Makoto Fujikawa, Yoshihiro Hirota, Rong-Ching Yang, Tomonari Yamamoto | 2020-08-18 |
| 10665470 | Etching method and etching apparatus | Yasuo ASADA, Takehiko Orii, Shinji Irie, Nobuhiro Takahashi, Ayano HAGIWARA | 2020-05-26 |
| 10641553 | Heat treatment apparatus, regulation method of heat treatment apparatus, and program | Yuto Noda, Masayoshi Masunaga, Koji Yoshii | 2020-05-05 |
| 10629448 | Method of manufacturing semiconductor device and vacuum processing apparatus | Reiji Niino, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2020-04-21 |
| 10593556 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Koichi Yatsuda, Takashi Hayakawa, Hiroshi Okuno, Reiji Niino, Hiroyuki Hashimoto | 2020-03-17 |