Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790135 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Reiji Niino, Makoto Fujikawa | 2020-09-29 |
| 10755971 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Reiji Niino, Hiroyuki Hashimoto, Makoto Fujikawa | 2020-08-25 |
| 10629448 | Method of manufacturing semiconductor device and vacuum processing apparatus | Tatsuya Yamaguchi, Reiji Niino, Hiroyuki Hashimoto, Makoto Fujikawa | 2020-04-21 |