Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790135 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Syuji NOZAWA, Makoto Fujikawa | 2020-09-29 |
| 10755971 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2020-08-25 |
| 10748782 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Makoto Fujikawa, Yoshihiro Hirota, Rong-Ching Yang, Tomonari Yamamoto | 2020-08-18 |
| 10629448 | Method of manufacturing semiconductor device and vacuum processing apparatus | Tatsuya Yamaguchi, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2020-04-21 |
| 10593556 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Koichi Yatsuda, Takashi Hayakawa, Hiroshi Okuno, Hiroyuki Hashimoto, Tatsuya Yamaguchi | 2020-03-17 |