Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734242 | Substrate processing method and substrate processing apparatus | Kazuaki Nishimura, Koji Takeya | 2020-08-04 |
| 10734243 | Etching method and substrate processing system | Tsuhung Huang, Takehiko Orii | 2020-08-04 |