KT

Koji Takeya

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #384,077 of 565,922Top 70%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10734242 Substrate processing method and substrate processing apparatus Kazuaki Nishimura, Jun LIN 2020-08-04