Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867814 | Liquid processing method, substrate processing apparatus, and storage medium | Yosuke Kawabuchi, Kouzou Tachibana, Mitsunori Nakamori, Kotaro Ooishi, Keisuke Egashira +6 more | 2020-12-15 |
| 10792711 | Substrate processing system, substrate cleaning method, and recording medium | Meitoku Aibara, Yuki Yoshida, Hisashi Kawano, Itaru Kanno, Kenji Mochida +1 more | 2020-10-06 |