Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10792711 | Substrate processing system, substrate cleaning method, and recording medium | Meitoku Aibara, Yuki Yoshida, Masami Yamashita, Itaru Kanno, Kenji Mochida +1 more | 2020-10-06 |
| 10651061 | Substrate processing apparatus, substrate processing method and recording medium | Hiroki Ohno, Takao Inada | 2020-05-12 |