Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651061 | Substrate processing apparatus, substrate processing method and recording medium | Hiroki Ohno, Hisashi Kawano | 2020-05-12 |
| 10643874 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Hiroshi Tanaka, Tsukasa Hirayama | 2020-05-05 |