TH

Tsukasa Hirayama

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
📍 Rifu, JP: #128 of 313 inventorsTop 45%
Overall (2020): #237,803 of 565,922Top 45%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10643874 Substrate liquid processing apparatus, substrate liquid processing method, and storage medium Hiroshi Tanaka, Takao Inada 2020-05-05