Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872764 | Film forming method | Shinya Iwashita, Takamichi Kikuchi, Toshio Hasegawa, Tsuyoshi Moriya | 2020-12-22 |
| 10811264 | Film-forming method and film-forming apparatus | Yuichiro WAGATSUMA, Miyako Kaneko | 2020-10-20 |
| 10535528 | Method of forming titanium oxide film and method of forming hard mask | Naoki Shindo, Toshio Hasegawa, Miyako Kaneko | 2020-01-14 |