Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872764 | Film forming method | Shinya Iwashita, Naotaka Noro, Toshio Hasegawa, Tsuyoshi Moriya | 2020-12-22 |
| 10738374 | Method of performing a surface treatment on a mounting table, the mounting table and a plasma processing apparatus | Shinya Okabe, Hideaki Yamasaki, Junya Oka, Yuuji Kobayashi | 2020-08-11 |
| 10665431 | Processing method | Kazuyuki Tezuka, Kenichi Kato, Atsushi Sawachi, Takanori Mimura | 2020-05-26 |
| 10546753 | Method of removing silicon oxide film | Hideaki Yamasaki, Seishi Murakami | 2020-01-28 |