Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665430 | Gas supply system, substrate processing system and gas supply method | Norihiko Amikura, Kouji Nishino, Yohei Sawada, Yoshiharu Kishida | 2020-05-26 |
| 10665431 | Processing method | Kazuyuki Tezuka, Kenichi Kato, Takamichi Kikuchi, Takanori Mimura | 2020-05-26 |
| 10607819 | Cleaning method and processing apparatus | Eiji Takahashi, Norikazu Sasaki | 2020-03-31 |
| 10533916 | Method for inspecting for leaks in gas supply system valves | Norihiko Amikura | 2020-01-14 |