Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665430 | Gas supply system, substrate processing system and gas supply method | Atsushi Sawachi, Norihiko Amikura, Kouji Nishino, Yohei Sawada | 2020-05-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665430 | Gas supply system, substrate processing system and gas supply method | Atsushi Sawachi, Norihiko Amikura, Kouji Nishino, Yohei Sawada | 2020-05-26 |