Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10738374 | Method of performing a surface treatment on a mounting table, the mounting table and a plasma processing apparatus | Shinya Okabe, Junya Oka, Yuuji Kobayashi, Takamichi Kikuchi | 2020-08-11 |
| 10731248 | Vacuum processing apparatus and operation method thereof | Shinya Okabe, Takeshi ITATANI | 2020-08-04 |
| 10546753 | Method of removing silicon oxide film | Takamichi Kikuchi, Seishi Murakami | 2020-01-28 |