Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847379 | Etching method and etching apparatus | Masato Sakamoto, Tadahiro Ishizaka | 2020-11-24 |
| 10731248 | Vacuum processing apparatus and operation method thereof | Hideaki Yamasaki, Shinya Okabe | 2020-08-04 |