Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847379 | Etching method and etching apparatus | Masato Sakamoto, Takeshi ITATANI | 2020-11-24 |
| 10629433 | Method of manufacturing ruthenium wiring | — | 2020-04-21 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847379 | Etching method and etching apparatus | Masato Sakamoto, Takeshi ITATANI | 2020-11-24 |
| 10629433 | Method of manufacturing ruthenium wiring | — | 2020-04-21 |