Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10738374 | Method of performing a surface treatment on a mounting table, the mounting table and a plasma processing apparatus | Shinya Okabe, Hideaki Yamasaki, Junya Oka, Takamichi Kikuchi | 2020-08-11 |