Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10851468 | Substrate processing apparatus and substrate processing method | Tadashi Iino, Toru Ihara, Yoshihiro Kai | 2020-12-01 |
| 10707102 | Substrate processing apparatus and substrate processing method | Hiromitsu Namba, Fitrianto, Yoshifumi Amano | 2020-07-07 |