HN

Hiromitsu Namba

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #449,204 of 565,922Top 80%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10707102 Substrate processing apparatus and substrate processing method Fitrianto, Yoichi Tokunaga, Yoshifumi Amano 2020-07-07