Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10713772 | Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium | Yuki Ito, Eiichiro Okamoto, Kazuya Iwanaga, Ryoji Ikebe | 2020-07-14 |
| 10707102 | Substrate processing apparatus and substrate processing method | Hiromitsu Namba, Fitrianto, Yoichi Tokunaga | 2020-07-07 |
| 10643865 | Substrate cleaning apparatus | Yuki Ito, Kento Kurusu | 2020-05-05 |