Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10713772 | Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium | Yoshifumi Amano, Yuki Ito, Eiichiro Okamoto, Kazuya Iwanaga | 2020-07-14 |
| 10707109 | Substrate processing apparatus | Satoshi Morita, Yasuaki Noda, Norihisa Koga, Keisuke Hamamoto, Masato Hosaka | 2020-07-07 |