Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10795265 | Substrate processing apparatus, substrate processing method, and storage medium | Yoshitaka Konishi, Naruaki Iida, Yuzo Ohishi, Kazuhiro Takeshita | 2020-10-06 |
| 10707109 | Substrate processing apparatus | Satoshi Morita, Ryoji Ikebe, Yasuaki Noda, Keisuke Hamamoto, Masato Hosaka | 2020-07-07 |
| 10642168 | Auxiliary exposure apparatus and exposure amount distribution acquisition method | Hideaki Kashiwagi, Takafumi Niwa | 2020-05-05 |