Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10795265 | Substrate processing apparatus, substrate processing method, and storage medium | Norihisa Koga, Yoshitaka Konishi, Yuzo Ohishi, Kazuhiro Takeshita | 2020-10-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10795265 | Substrate processing apparatus, substrate processing method, and storage medium | Norihisa Koga, Yoshitaka Konishi, Yuzo Ohishi, Kazuhiro Takeshita | 2020-10-06 |