Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877376 | Light irradiating device | Ryo Shimada, Teruhiko Moriya | 2020-12-29 |
| 10795265 | Substrate processing apparatus, substrate processing method, and storage medium | Norihisa Koga, Yoshitaka Konishi, Naruaki Iida, Yuzo Ohishi | 2020-10-06 |
| 10638650 | Apparatus and method of loading components | Toshiro Hirakawa, Yoichiro Sugimoto, Kenji Ishiyama | 2020-04-28 |