Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877376 | Light irradiating device | Ryo Shimada, Kazuhiro Takeshita | 2020-12-29 |
| 10747121 | Optical processing apparatus and substrate processing apparatus | Masaru Tomono, Ryo Shimada, Makoto Hayakawa, Seiji Nagahara | 2020-08-18 |
| 10558125 | Exposure apparatus, exposure apparatus adjustment method and storage medium | Masaru Tomono, Ryo Shimada, Makoto Hayakawa, Seiji Nagahara | 2020-02-11 |