Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10747121 | Optical processing apparatus and substrate processing apparatus | Teruhiko Moriya, Ryo Shimada, Makoto Hayakawa, Seiji Nagahara | 2020-08-18 |
| 10558125 | Exposure apparatus, exposure apparatus adjustment method and storage medium | Teruhiko Moriya, Ryo Shimada, Makoto Hayakawa, Seiji Nagahara | 2020-02-11 |
| 10527948 | Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage medium | Seiji Nagahara, Nobutaka Fukunaga, Gousuke Shiraishi | 2020-01-07 |