Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10747121 | Optical processing apparatus and substrate processing apparatus | Teruhiko Moriya, Masaru Tomono, Ryo Shimada, Makoto Hayakawa | 2020-08-18 |
| 10558125 | Exposure apparatus, exposure apparatus adjustment method and storage medium | Teruhiko Moriya, Masaru Tomono, Ryo Shimada, Makoto Hayakawa | 2020-02-11 |
| 10534266 | Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes | Michael A. Carcasi, Joshua Hooge, Benjamen M. Rathsack | 2020-01-14 |
| 10527948 | Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage medium | Masaru Tomono, Nobutaka Fukunaga, Gousuke Shiraishi | 2020-01-07 |