Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768436 | Image shake correction unit, lens apparatus using the same, and image pickup apparatus | Nobuyuki Nagaoka | 2020-09-08 |
| 10747121 | Optical processing apparatus and substrate processing apparatus | Teruhiko Moriya, Masaru Tomono, Ryo Shimada, Seiji Nagahara | 2020-08-18 |
| 10558125 | Exposure apparatus, exposure apparatus adjustment method and storage medium | Teruhiko Moriya, Masaru Tomono, Ryo Shimada, Seiji Nagahara | 2020-02-11 |
| 10539514 | Substrate inspection method, computer storage medium and substrate inspection apparatus | Takuya Mori | 2020-01-21 |
| 10529604 | Substrate position adjustment method, storage medium and substrate treatment system | — | 2020-01-07 |