Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809620 | Systems and methods for developer drain line monitoring | Mark H. Somervell, Joshua Hooge | 2020-10-20 |
| 10551743 | Critical dimension control by use of photo-sensitized chemicals or photo-sensitized chemically amplified resist | Anton J. deVilliers | 2020-02-04 |
| 10534266 | Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes | Joshua Hooge, Benjamen M. Rathsack, Seiji Nagahara | 2020-01-14 |