Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809620 | Systems and methods for developer drain line monitoring | Michael A. Carcasi, Joshua Hooge | 2020-10-20 |
| 10622267 | Facilitation of spin-coat planarization over feature topography during substrate fabrication | Ryan L. Burns, Benjamen M. Rathsack, Makoto Muramatsu | 2020-04-14 |