Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622267 | Facilitation of spin-coat planarization over feature topography during substrate fabrication | Ryan L. Burns, Mark H. Somervell, Makoto Muramatsu | 2020-04-14 |
| 10534266 | Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes | Michael A. Carcasi, Joshua Hooge, Seiji Nagahara | 2020-01-14 |