Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809620 | Systems and methods for developer drain line monitoring | Michael A. Carcasi, Mark H. Somervell | 2020-10-20 |
| 10622233 | Amelioration of global wafer distortion based on determination of localized distortions of a semiconductor wafer | Nathan Ip, Joel Estrella, Anton J. deVilliers | 2020-04-14 |
| 10534266 | Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes | Michael A. Carcasi, Benjamen M. Rathsack, Seiji Nagahara | 2020-01-14 |