Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622267 | Facilitation of spin-coat planarization over feature topography during substrate fabrication | Ryan L. Burns, Benjamen M. Rathsack, Mark H. Somervell | 2020-04-14 |
| 10586711 | Substrate processing method and computer storage medium | Tadatoshi Tomita, Hisashi Genjima, Takahiro Kitano | 2020-03-10 |