Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10527948 | Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage medium | Seiji Nagahara, Masaru Tomono, Gousuke Shiraishi | 2020-01-07 |