Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10672606 | Coating film forming method, coating film forming apparatus, and storage medium | Kousuke Yoshihara | 2020-06-02 |
| 10642168 | Auxiliary exposure apparatus and exposure amount distribution acquisition method | Hideaki Kashiwagi, Norihisa Koga | 2020-05-05 |