Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734251 | Liquid processing apparatus, liquid processing method, and storage medium for liquid process | Koji Takayanagi, Yukie Minekawa, Yuichi Yoshida, Yuichi Terashita, Toshinobu Furusho +1 more | 2020-08-04 |
| 10672606 | Coating film forming method, coating film forming apparatus, and storage medium | Takafumi Niwa | 2020-06-02 |