Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838311 | Coating and developing apparatus and coating and developing method | Keigo Nakano, Masashi Tsuchiyama | 2020-11-17 |
| 10734251 | Liquid processing apparatus, liquid processing method, and storage medium for liquid process | Yukie Minekawa, Yuichi Yoshida, Kousuke Yoshihara, Yuichi Terashita, Toshinobu Furusho +1 more | 2020-08-04 |