Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867817 | Substrate processing apparatus, substrate processing method, and storage medium | Takaya Kikai, Yuzo Ohishi | 2020-12-15 |
| 10734251 | Liquid processing apparatus, liquid processing method, and storage medium for liquid process | Koji Takayanagi, Yukie Minekawa, Kousuke Yoshihara, Yuichi Terashita, Toshinobu Furusho +1 more | 2020-08-04 |
| 10622944 | Semiconductor device and measurement device | Kengo Takemasa, Toshihisa Sone, Kazuya Yamada, Akihiro Takei | 2020-04-14 |
| 10615062 | Substrate processing apparatus, substrate processing method, and storage medium | Takaya Kikai, Yuzo Ohishi | 2020-04-07 |
| 10615108 | Semiconductor device and measurement device | Toshihisa Sone, Kazuya Yamada, Akihiro Takei, Kengo Takemasa | 2020-04-07 |